Beilstein J. Nanotechnol.2022,13, 344–354, doi:10.3762/bjnano.13.29
: aluminiumzincoxide; magnetron sputtering; thin film; transparent conducting oxide; transparent electronics; Introduction
Aluminium-doped zinc oxide (AZO) is a potential alternative to indium tin oxide (ITO) for transparent conducting oxide (TCO) electrodes in transparent electronic and photovoltaic
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Figure 1:
Schematic diagram of a sputtering system for the deposition of AlxZnyO films.